Considerations in the design of support circuitry for MEMS sensors in biomedical applications

Kerry L. Dunn; Alex J. Hariz

doi:10.1117/12.639122

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5 January 2006 Considerations in the design of support circuitry for MEMS sensors in biomedical applications

Kerry L. Dunn, Alex J. Hariz

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Proceedings Volume 6035, Microelectronics: Design, Technology, and Packaging II; 603521 (2006) https://doi.org/10.1117/12.639122
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

Recently, advances in fabrication accuracy and decreasing feature size have lead to the application of piezoresistive pressure sensors to more challenging and confined environments. A particularly promising area has been miniature manometric catheters for invivo diagnostics. Many monolithic circuit designs have been proposed with this in mind, promising to deliver accuracy, increased sensitivity, multiplexing capacity and extremely reduced sizes. However, the delivery of a complete and commercially viable diagnostic device requires the consideration of many extended and interrelated variables dependent on the specific use of the device in the medical field. When designing the readout circuitry considerations may include the cost, size, complexity, manufacturing method, required accuracy, and durability of each component within the system. These factors influence the nature of support circuitry, and determine the level of integration required. This paper briefly describes the characteristics of piezoresistive Wheatstone bridge pressure sensors, and discusses options and considerations in the design of support circuitry for use in biomedical manometric catheters.

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Kerry L. Dunn and Alex J. Hariz "Considerations in the design of support circuitry for MEMS sensors in biomedical applications", Proc. SPIE 6035, Microelectronics: Design, Technology, and Packaging II, 603521 (5 January 2006); https://doi.org/10.1117/12.639122

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