Two-photon polymerization process for optically driven micromachines

Gregor Knöner; Julien Higuet; Simon Parkin; Timo A. Nieminen; Norman R. Heckenberg; Halina Rubinsztein-Dunlop

doi:10.1117/12.651757

Translator Disclaimer

18 January 2006 Two-photon polymerization process for optically driven micromachines

Gregor Knöner, Julien Higuet, Simon Parkin, Timo A. Nieminen, Norman R. Heckenberg, Halina Rubinsztein-Dunlop

Author Affiliations +

Proceedings Volume 6038, Photonics: Design, Technology, and Packaging II; 603810 (2006) https://doi.org/10.1117/12.651757
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

Exposure of optically curing resin with highly focussed femtosecond laser pulses provides excellent means to produce high resolution micron sized structures. We use the process to fabricate micromechanical components for lab-on-a-chip applications. We present here our experimental realization of the microscope system used for photopolymerization and detail the advantage of our fabrication process. We characterize our structures using scanning electron microscopy, and compare the results with available data. We demonstrate the technique by manufacturing a movable joint and a free floating cross which is three dimensionally trapped. Future applications of this technique will focus on developing optically driven motors and an all optical measurement of applied torques.

Citation Download Citation

Gregor Knöner, Julien Higuet, Simon Parkin, Timo A. Nieminen, Norman R. Heckenberg, and Halina Rubinsztein-Dunlop "Two-photon polymerization process for optically driven micromachines", Proc. SPIE 6038, Photonics: Design, Technology, and Packaging II, 603810 (18 January 2006); https://doi.org/10.1117/12.651757

ACCESS THE FULL ARTICLE