Small displacement measurement based on surface plasmon resonance and heterodyne interferometry

Ming-Hung Chiu; Bo-Yuan Shih; Chih-Hsien Shih; Ling-Chih Kao; Lih-Horng Shyu

doi:10.1117/12.637737

18 January 2006 Small displacement measurement based on surface plasmon resonance and heterodyne interferometry

Ming-Hung Chiu, Bo-Yuan Shih, Chih-Hsien Shih, Ling-Chih Kao, Lih-Horng Shyu

Proceedings Volume 6038, Photonics: Design, Technology, and Packaging II; 60381C (2006) https://doi.org/10.1117/12.637737
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

A new method for small displacement measurement based on surface plasmon resonance and heterodyne interferometry is presented. A heterodyne light is focused on a mirror and reflected from it, and then it is incident on a prism which was coated with a thin gold film. When the mirror or the objective lens has a small displacement, the light will be converging or diverging into the prism, and the phase variation between two parts of the test beam under the condition of surface plasmon resonance (SPR) can be measured by using a two-segment photodiode and a lock-in amplifier. This phase difference between two parts of the test beam is proportional to the departure of the mirror from the focal plane, so the displacement can be obtained in real-time. It has some merits, such as, simple, stable, very high sensitivity and resolution. And its resolution is better than 1nm.

Citation Download Citation

Ming-Hung Chiu, Bo-Yuan Shih, Chih-Hsien Shih, Ling-Chih Kao, and Lih-Horng Shyu "Small displacement measurement based on surface plasmon resonance and heterodyne interferometry", Proc. SPIE 6038, Photonics: Design, Technology, and Packaging II, 60381C (18 January 2006); https://doi.org/10.1117/12.637737

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