Paper
20 February 2006 A novel integrated capillary electrophoresis chip with a self-rinsing micropump
L. Tian, W. Wang, W. P. Chen, X. W. Liu, Zh. Y. Bao
Author Affiliations +
Proceedings Volume 6041, ICMIT 2005: Information Systems and Signal Processing; 60411E (2006) https://doi.org/10.1117/12.664332
Event: ICMIT 2005: Merchatronics, MEMS, and Smart Materials, 2005, Chongqing, China
Abstract
The miniaturized system is fabricated on the PMMA substrate including the CE separation chip and the PZT micropump chip. Adopted the PZT materials deformation as actuation force, the micropump is of the bi-direction flow capability to finish the self-rinsing process. The dimension of this micropump is 14×14×3 mm3. The volume of the pump chamber is about 20mm3. The pump can produce a maximum back pressure of 2m H2O and a maximum flow rate of 13 mL/min under 145 V, 100Hz squired wave power supply. The optimized capillary channel structure is chosen by the width of 50 μm, the depth is 20μm and the effective separating length is 50mm with round corner sinuous channel. The whole chip area is 55×20mm2.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
L. Tian, W. Wang, W. P. Chen, X. W. Liu, and Zh. Y. Bao "A novel integrated capillary electrophoresis chip with a self-rinsing micropump", Proc. SPIE 6041, ICMIT 2005: Information Systems and Signal Processing, 60411E (20 February 2006); https://doi.org/10.1117/12.664332
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KEYWORDS
Capillaries

Ferroelectric materials

Silicon

Polymethylmethacrylate

Microfabrication

Power supplies

Liquids

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