MEMS for micro optics: from fiber optic communication to display (Invited Paper)

H. Toshiyoshi

doi:10.1117/12.652527

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5 December 2005 MEMS for micro optics: from fiber optic communication to display (Invited Paper)

H. Toshiyoshi

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Proceedings Volume 6050, Optomechatronic Micro/Nano Devices and Components; 605007 (2005) https://doi.org/10.1117/12.652527
Event: Optomechatronic Technologies 2005, 2005, Sapporo, Japan

Abstract

This paper gives a comprehensive and up-to-date review of our research activity on MEMS (micro electro mechanical systems) for all- optical fiber optic communications. Micromechanical approach for handling optical signal has advantages over solid-state devices in terms of high contrast intensity modulation by relatively large change of refractive index, large spatial scan angle by optomechanical reflection or refraction, and optical transparency in wide range of wavelength. MEMS also has industrial impact in a sense that it could potentially eliminate or cut down the cost of optical assembly thanks to the optical pre-aligning or self-aligning capability. In particular, we take an example of MEMS variable optical attenuator (VOA) that we have commercially released in cooperation with an industrial partner. Besides fiber optic MEMS, we also mention other applications such as projection displays using a high-speed MEMS optical scanner for scanning modulated laser beam to create images. Furthermore, we also introduce a MEMS color pixel based upon the mechanically tunable Fabry-Perot interferometer made of two plastic films; the color pixel can be assembled in an array format to create a transparent-type over-sized electronic poster which is mechanically flexible and electrically rewritable.

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H. Toshiyoshi "MEMS for micro optics: from fiber optic communication to display (Invited Paper)", Proc. SPIE 6050, Optomechatronic Micro/Nano Devices and Components, 605007 (5 December 2005); https://doi.org/10.1117/12.652527

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