Optical MEMS and polymers: an overview (Invited Paper)

P. R. Patterson

doi:10.1117/12.654007

5 December 2005 Optical MEMS and polymers: an overview (Invited Paper)

P. R. Patterson

Proceedings Volume 6050, Optomechatronic Micro/Nano Devices and Components; 60500P (2005) https://doi.org/10.1117/12.654007
Event: Optomechatronic Technologies 2005, 2005, Sapporo, Japan

Abstract

Polymer materials offer unique properties for fabrication of micro-optical systems. The ability to engineer the optical and mechanical properties of polymers, the low cost of polymers, and the wide choice of fabrication methods make polymers particularly attractive for low cost, and potential mass production of micro-optical elements and integrated micro-optical systems. An overview of the current state of the art in polymer micro-optic fabrication technology and applications to optical MEMS is presented.

Citation Download Citation

P. R. Patterson "Optical MEMS and polymers: an overview (Invited Paper)", Proc. SPIE 6050, Optomechatronic Micro/Nano Devices and Components, 60500P (5 December 2005); https://doi.org/10.1117/12.654007

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