A 100-kHz thin disk Yb:YAG regenerative amplifier

Taisuke Miura; Akira Endo

doi:10.1117/12.645775

23 February 2006 A 100-kHz thin disk Yb:YAG regenerative amplifier

Taisuke Miura, Akira Endo

Proceedings Volume 6101, Laser Beam Control and Applications; 61011R (2006) https://doi.org/10.1117/12.645775
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

We developed the elemental technologies to construct a 500-W thin disk regenerative amplifier for EUV application. We obtained the well-polarized CW output of over 900 W without any compensation optics of the birefringence error. The extinction ratio of output was over 1:140. We developed and installed the water-cooled Pockels cell into the CW laser cavity to act as a polarization rotator by applying a DC-voltage to the cell. We confirmed that the cooled cell did not create distinguished birefringence and thermal lensing over 900-W operation. The deforming of thin-disk at high power operation was estimated by using a commercial M² meter. We optimized the cavity configuration from the estimation results to obtain high beam quality. After the optimization, the M² values kept up to 3.5 until the output reached to 400 W. At the 100-W output, the M² in vertical and horizontal plane were 1.47 and 1.43, respectively.

Citation Download Citation

Taisuke Miura and Akira Endo "A 100-kHz thin disk Yb:YAG regenerative amplifier", Proc. SPIE 6101, Laser Beam Control and Applications, 61011R (23 February 2006); https://doi.org/10.1117/12.645775

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