High quality laser milling of ceramics, dielectrics and metals using nanosecond and picosecond lasers

Dimitris Karnakis; Graham Rutterford; Martyn Knowles; Todor Dobrev; Petko Petkov; Stefan Dimov

doi:10.1117/12.645711

1 March 2006 High quality laser milling of ceramics, dielectrics and metals using nanosecond and picosecond lasers

Dimitris Karnakis, Graham Rutterford, Martyn Knowles, Todor Dobrev, Petko Petkov, Stefan Dimov

Proceedings Volume 6106, Photon Processing in Microelectronics and Photonics V; 610604 (2006) https://doi.org/10.1117/12.645711
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

Laser milling of industrial materials like ceramics, dielectrics and metals is of significant commercial interest for microfabrication of micro-moulds and other micro-system devices. 2.5D laser machined structures were generated in alumina, tungsten and steel substrates using a nanosecond copper vapour laser (511nm) at 10 kHz. Preliminary results in fused silica, alumina and steel are also presented from a high repetition rate amplified mode-locked picosecond Nd:vanadate laser. It is shown that high quality surface finish can be achieved with both laser types; for example, average surface roughness, Ra ~ 300nm has been demonstrated in steel. Fused silica could only be processed with picosecond laser pulses. Volume removal rates are analysed, which are especially high for difficult materials like tungsten (~0.1mm³/min) and are greater compared to other milling technology like micro-EDM. Surface roughness measurements in these materials using white light interferometry are reported along with SEM analysis.

Citation Download Citation

Dimitris Karnakis, Graham Rutterford, Martyn Knowles, Todor Dobrev, Petko Petkov, and Stefan Dimov "High quality laser milling of ceramics, dielectrics and metals using nanosecond and picosecond lasers", Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 610604 (1 March 2006); https://doi.org/10.1117/12.645711

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