A neuro-fuzzy approach to failure detection and diagnosis of excimer laser ablation in microvia formation

Ronald Setia; Gary S. May

doi:10.1117/12.655296

1 March 2006 A neuro-fuzzy approach to failure detection and diagnosis of excimer laser ablation in microvia formation

Ronald Setia, Gary S. May

Proceedings Volume 6106, Photon Processing in Microelectronics and Photonics V; 610607 (2006) https://doi.org/10.1117/12.655296
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

Excimer laser ablation is used for microvia formation in the microelectronics packaging industry. With continuing advancement of laser systems, there is an increasing need to offset capital equipment investment and lower equipment downtime. This paper presents a neuro-fuzzy methodology for in-line failure detection and diagnosis of the excimer laser ablation process. Response data originating directly from laser tool sensors and the characterization of microvias were used as failure symptoms for potential deviations in four laser system parameters from their corresponding baseline values. The response characteristics consist of via diameter, via wall angle, and via resistance. Resistance measurements on copper deposited in the ablated vias were performed to characterize the degree to which debris remaining inside the vias affected quality. The laser system parameters include laser fluence, shot frequency, number of pulses, and helium pressure flow. The adaptive neuro-fuzzy inference system (ANFIS) was trained and subsequently validated for its capability in evidential reasoning using the data collected. Results indicated only a single false alarm occurred in 19 possible failure detection scenarios. In failure diagnosis, a single false alarm and a single missed alarm occurred.

Citation Download Citation

Ronald Setia and Gary S. May "A neuro-fuzzy approach to failure detection and diagnosis of excimer laser ablation in microvia formation", Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 610607 (1 March 2006); https://doi.org/10.1117/12.655296

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available