Vaporization and deposition of an intact polyimide precursor by resonant infrared pulsed laser ablation

N. L. Dygert; K. E. Schriver; R. F. Haglund Jr.

doi:10.1117/12.646906

23 February 2006 Vaporization and deposition of an intact polyimide precursor by resonant infrared pulsed laser ablation

N. L. Dygert, K. E. Schriver, R. F. Haglund Jr.

Author Affiliations +

Proceedings Volume 6107, Laser-based Micropackaging; 61070N (2006) https://doi.org/10.1117/12.646906
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

Poly(amic acid) (PAA), a precursor to polyimide, was successfully deposited on substrates without reaching curing temperature, by resonant infrared pulsed laser ablation. The PAA was prepared by dissolving pyromellitic dianhydride and 4, 4' oxidianiline in the polar solvent N-methyl pyrrolidinone (NMP). RIR-PLD transferred material showed two distinct geometries, droplets and string-like moieties. The unaltered nature of the deposited PAA was confirmed by Fourier transform infrared spectroscopy (FTIR). Thermal curing was achieved by heating for one hour on a 250°C hotplate, and the transformation to polyimide was demonstrated from changes in the FTIR spectrum following curing. Plume shadowgraphy showed very clear contrasts in the ablation mechanism between ablation of the solvent alone and the ablation of the PAA, with additional contrast shown between the various resonant frequencies used.

Citation Download Citation

N. L. Dygert, K. E. Schriver, and R. F. Haglund Jr. "Vaporization and deposition of an intact polyimide precursor by resonant infrared pulsed laser ablation", Proc. SPIE 6107, Laser-based Micropackaging, 61070N (23 February 2006); https://doi.org/10.1117/12.646906

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