Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid

Y. X. Han; H. Ling; Y. F. Lu; M. J. O'Keefe; T. McKindra

doi:10.1117/12.644984

23 February 2006 Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid

Y. X. Han, H. Ling, Y. F. Lu, M. J. O'Keefe, T. McKindra

Proceedings Volume 6107, Laser-based Micropackaging; 61070P (2006) https://doi.org/10.1117/12.644984
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

Diamond-like carbon (DLC) films were synthesized by KrF excimer laser irradiation of single-crystal Si substrates immersed in a cyclohexane liquid. The deposition process was performed with a peak laser power density of about 10⁸ W/cm² in open atmosphere at room temperature. Scanning electron microscopy (SEM), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) studies showed diamond-like characteristics of the deposited films. Optical emission spectroscopy (OES) of laser-induced plasmas of cyclohexane indicated decomposition of the cyclohexane molecules. A mechanism based on the dissociation of the cyclohexane molecules and condensation of energetic carbon atoms into diamond-like films was proposed to explain the process.

Citation Download Citation

Y. X. Han, H. Ling, Y. F. Lu, M. J. O'Keefe, and T. McKindra "Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid", Proc. SPIE 6107, Laser-based Micropackaging, 61070P (23 February 2006); https://doi.org/10.1117/12.644984

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