A curled-hinge comb micro-mirror using CMOS-MEMS process

Y. R. Huang; H. M. Tai; H. P. Chou

doi:10.1117/12.645214

23 January 2006 A curled-hinge comb micro-mirror using CMOS-MEMS process

Y. R. Huang, H. M. Tai, H. P. Chou

Proceedings Volume 6109, Micromachining and Microfabrication Process Technology XI; 61090O (2006) https://doi.org/10.1117/12.645214
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

This paper presents a large displacement static-electricity curled-hinge comb micro-mirror made by a CMOS-MEMS process. A micro-spring is incorporated to reduce the stress effects and the process variation. A mirror with a size of 500um x 500um is made using three metal layers. The micro-spring made a metal layer and a poly layer with a size of 4um x 21um. The nature frequency is 727 Hz and the maximum displacement of the micro-mirror is 32um using a driving voltage of 25 volts. The process variation has been successfully reduced from 30% to 10%.

Citation Download Citation

Y. R. Huang, H. M. Tai, and H. P. Chou "A curled-hinge comb micro-mirror using CMOS-MEMS process", Proc. SPIE 6109, Micromachining and Microfabrication Process Technology XI, 61090O (23 January 2006); https://doi.org/10.1117/12.645214

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