5~10 GHz surface acoustic wave resonators and low-loss wide band filters using submicron fabrication technology

K. Yamanouchi; Y. Satoh; H. Isono; D. Kawasaki

doi:10.1117/12.645639

23 January 2006 5~10 GHz surface acoustic wave resonators and low-loss wide band filters using submicron fabrication technology

K. Yamanouchi, Y. Satoh, H. Isono, D. Kawasaki

Author Affiliations +

Proceedings Volume 6109, Micromachining and Microfabrication Process Technology XI; 61090P (2006) https://doi.org/10.1117/12.645639
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

We show the SAW resonators and ladder type SAW resonator filters using high coupling SiO₂/5°Y-X LiNbO₃ with Zero Temperature Coefficients of Frequency (TCF). The theoretical analysis of 5~10GHz ladder type filters including the propagation attenuations and resistive loss of interdigital transducers are shown. Finally the experimental results below 2.0dB insertion loss with a wide band and zero TCF at 5 ~ 10GHz-range are shown.

Citation Download Citation

K. Yamanouchi, Y. Satoh, H. Isono, and D. Kawasaki "5~10 GHz surface acoustic wave resonators and low-loss wide band filters using submicron fabrication technology", Proc. SPIE 6109, Micromachining and Microfabrication Process Technology XI, 61090P (23 January 2006); https://doi.org/10.1117/12.645639

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available