Effect of two- and three-zone phase masks on the axial and transverse intensity distribution under high numerical aperture focusing

Stephen M. Kuebler; Toufic Jabbour

doi:10.1117/12.647618

23 January 2006 Effect of two- and three-zone phase masks on the axial and transverse intensity distribution under high numerical aperture focusing

Stephen M. Kuebler, Toufic Jabbour

Author Affiliations +

Proceedings Volume 6110, Micromachining Technology for Micro-Optics and Nano-Optics IV; 61100B (2006) https://doi.org/10.1117/12.647618
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

Vector diffraction theory was applied to study computationally the effect of two and three-zone annular multi-phase plates (AMPs) on the three-dimensional point-spread-function (PSF). The two- and four-dimensional solutions spaces associated with a two- and three-zone AMP, respectively, were discretized and the PSF was calculated using the Wolf diffraction integrals for each unique combination of zone radius and relative phase. Conditions are identified in which a three-zone AMP generates an intensity distribution that is super-resolved by 19% in the axial direction with minimal change in the transverse distribution and sufficiently small axial side-lobes that this intensity pattern could be used for advanced photolithographic techniques, such as multi-photon three-dimensional microfabrication.

Citation Download Citation

Stephen M. Kuebler and Toufic Jabbour "Effect of two- and three-zone phase masks on the axial and transverse intensity distribution under high numerical aperture focusing", Proc. SPIE 6110, Micromachining Technology for Micro-Optics and Nano-Optics IV, 61100B (23 January 2006); https://doi.org/10.1117/12.647618

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