Tolerancing microlenses using ZEMAX

Andrew Stockham; John G. Smith

doi:10.1117/12.644894

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23 January 2006 Tolerancing microlenses using ZEMAX

Andrew Stockham, John G. Smith

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Proceedings Volume 6110, Micromachining Technology for Micro-Optics and Nano-Optics IV; 61100U (2006) https://doi.org/10.1117/12.644894
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

This paper demonstrates a new tolerancing technique that allows the prediction of microlens optical performance based on metrology measurements taken during the fabrication process. A method for tolerancing microlenses to ensure operating performance using the optical design code ZEMAX^(R) is presented. Parameters able to be measured by available metrology tools are assigned tolerances. The goal of the tolerance analysis is to assess the sensitivity of a microlens design to changes in the shape of the lens surface with regard to specific optical performance criteria related to the intended application. Two designs are presented with the tolerance analysis results. In the first design, the radius of curvature and conic constant are varied for an aspheric lens, and the change in the spot size is determined. For the second design, fiber-coupling efficiency is tabulated for a biconic lens. In each case, a metric can be produced showing the ability of the design to meet performance goals within the specified tolerances. A fabrication technician can then use this tolerancing metric with appropriate metrology data to determine if the device will yield acceptable performance. The metric can also determine if a design is overly sensitive to expected tolerances, thereby allowing the optical designer to evaluate the design from a manufacturing perspective.

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Andrew Stockham and John G. Smith "Tolerancing microlenses using ZEMAX", Proc. SPIE 6110, Micromachining Technology for Micro-Optics and Nano-Optics IV, 61100U (23 January 2006); https://doi.org/10.1117/12.644894

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