On-chip integrated spectrometer and microfluidic fluorescence set-up

Anders M. Jorgensen; Dan A. Zauner; Thomas A. Anhoj; Peter M. Moselund; Jörg Hübner

doi:10.1117/12.646453

23 January 2006 On-chip integrated spectrometer and microfluidic fluorescence set-up

Anders M. Jorgensen, Dan A. Zauner, Thomas A. Anhoj, Peter M. Moselund, Jörg Hübner

Proceedings Volume 6112, Microfluidics, BioMEMS, and Medical Microsystems IV; 611209 (2006) https://doi.org/10.1117/12.646453
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

Lab-on-chip systems become increasingly more relevant for biochemical analyses. Here is presented a concept for realizing a small footprint chip by combining fluorescence detection and on-chip spectrometry. The chip is to be fabricated using a single mask process based on the negative photoresist SU-8. The various subcomponents are discussed; in particular a spectrometer is presented and interfaced to a linear CCD. The integrated spectrometer combined with the CCD displays a resolving power of 175 for HeNe laser light. The fluidic system is a simple passive microfluidic network which can withstand a pressure in excess of 22 kPa without leakage as long as the sidewall is 10 μm or thicker.

Citation Download Citation

Anders M. Jorgensen, Dan A. Zauner, Thomas A. Anhoj, Peter M. Moselund, and Jörg Hübner "On-chip integrated spectrometer and microfluidic fluorescence set-up", Proc. SPIE 6112, Microfluidics, BioMEMS, and Medical Microsystems IV, 611209 (23 January 2006); https://doi.org/10.1117/12.646453

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