An injection micromixer fabricated by improved SU-8 processing for biochemical microfluidic systems

Changgeng Liu; Zhong-geng Ling; Kun Lian; Jost Goettert; Josef Hormes

doi:10.1117/12.646049

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23 January 2006 An injection micromixer fabricated by improved SU-8 processing for biochemical microfluidic systems

Changgeng Liu, Zhong-geng Ling, Kun Lian, Jost Goettert, Josef Hormes

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Proceedings Volume 6112, Microfluidics, BioMEMS, and Medical Microsystems IV; 61120G (2006) https://doi.org/10.1117/12.646049
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

In this research, first a modular polymer-based (PMMA) injection micromixer prototype has been designed, fabricated and tested. This micromixer is easy to be integrated into biochemical microfluidic systems under development for BioMagnetICs DARPA funded project at CAMD. To improve the mixing efficiency, layout of micronozzles of the mixer was optimized according to the simulation results. Also because SU-8, an epoxy-based negative photoresist, has high chemical resistance, an SU-8 injection mixer was designed and fabricated to run some biochemical sample liquids. Internal stress in patterned SU-8 structures has been reduced and multi-layer SU-8 processing has been successfully developed to fabricate SU-8 injection mixer.

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Changgeng Liu, Zhong-geng Ling, Kun Lian, Jost Goettert, and Josef Hormes "An injection micromixer fabricated by improved SU-8 processing for biochemical microfluidic systems", Proc. SPIE 6112, Microfluidics, BioMEMS, and Medical Microsystems IV, 61120G (23 January 2006); https://doi.org/10.1117/12.646049

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