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23 January 2006 A novel excitation scheme for MEMS gyroscopes using parametric pumping for near inertial grade performance
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Abstract
In this paper an excitation scheme employing simultaneous harmonic forcing and parametric excitation is applied to an electrostatically actuated MEMS gyroscope in order to improve the rate resolution performance to near inertial grade. A multiples scales perturbation method is used to investigate the dynamics of the gyroscope and facilitate in the design of a control methodology that enables the parametric pumping phenomena to the realized practically. The analysis shows that the quality factor of the primary mode of the gyroscope may be increased arbitrarily through parametric excitation. This allows forcing levels for the primary mode to be reduced by several orders of magnitude whilst sustaining the primary mode amplitude. Simulation of the oscillator scheme, which is highly non-linear, is achieved using MATLAB Simulink and is applied to a micro-ring gyroscope. The simulation demonstrates the Q-factor of the primary mode is increased by two orders of magnitude whilst the harmonic forcing amplitude is reduced by the same order, when the control scheme is operating. Agreement between the perturbation analysis and MATLAB Simulink models is within 8%. The increase in the Q-factor by two orders of magnitude results in a decrease in the electrical noise due to feedthrough by two orders of magnitude. This will enable a significant improvement of resonant gyroscope performance.
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B. J. Gallacher, J. S. Burdess, and K. M. Harish "A novel excitation scheme for MEMS gyroscopes using parametric pumping for near inertial grade performance", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 611305 (23 January 2006); https://doi.org/10.1117/12.656323
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