Tiny bimorph mirrors for laser beam control

Alexis Kudryashov; Alexander Sobolev; Vadim Samarkin; Tatyana Cherezova

doi:10.1117/12.658201

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23 January 2006 Tiny bimorph mirrors for laser beam control

Alexis Kudryashov, Alexander Sobolev, Vadim Samarkin, Tatyana Cherezova

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Proceedings Volume 6113, MEMS/MOEMS Components and Their Applications III; 61130D (2006) https://doi.org/10.1117/12.658201
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

Formation of the given laser beam intensity and phase is an important practical and scientific problem. Semipassive bimorph flexible mirror is one of the most widely used devices for this purpose. We present a novel approach of multilayer bimorph (multimorph) mirrors and a numerical model to simulate them, based on a variation approach of the finite elements method. The multilayer bimorph mirror consists of a substrate and a number of piezoceramic layers. The electrode grid of each layer is determined separately to reproduce low order aberrations.

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Alexis Kudryashov, Alexander Sobolev, Vadim Samarkin, and Tatyana Cherezova "Tiny bimorph mirrors for laser beam control", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130D (23 January 2006); https://doi.org/10.1117/12.658201

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