MEMS actuated deformable mirror

Alexandros Papavasiliou; Scot Olivier; Troy Barbee; Chris Walton; Michael Cohn

doi:10.1117/12.657667

Translator Disclaimer

23 January 2006 MEMS actuated deformable mirror

Alexandros Papavasiliou, Scot Olivier, Troy Barbee, Chris Walton, Michael Cohn

Author Affiliations +

Proceedings Volume 6113, MEMS/MOEMS Components and Their Applications III; 61130P (2006) https://doi.org/10.1117/12.657667
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

This ongoing work concerns the creation of a deformable mirror by the integration of MEMS actuators with Nanolaminate foils through metal compression boning. These mirrors will use the advantages of these disparate technologies to achieve dense actuation of a high-quality, continuous mirror surface. They will enable advanced adaptive optics systems in large terrestrial telescopes. While MEMS actuators provide very dense actuation with high precision they can not provide large forces typically necessary to deform conventional mirror surfaces. Nanolaminate foils can be fabricated with very high surface quality while their extraordinary mechanical properties enable very thin, flexible foils to survive the rigors of fabrication. Precise metal compression bonding allows the attachment of the fragile MEMS actuators to the thin nanolaminate foils without creating distortions at the bond sites. This paper will describe work in four major areas: 1) modeling and design, 2) bonding development, 3) nanolaminate foil development, 4) producing a prototype. A first-principles analytical model was created and used to determine the design parameters. A method of bonding was determined that is both strong, and minimizes the localized deformation or print through. Work has also been done to produce nanolaminate foils that are sufficiently thin, flexible and flat to be deformed by the MEMS actuators. Finally a prototype was produced by bonding thin, flexible nanolaminate foils to commercially available MEMS actuators.

Citation Download Citation

Alexandros Papavasiliou, Scot Olivier, Troy Barbee, Chris Walton, and Michael Cohn "MEMS actuated deformable mirror", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130P (23 January 2006); https://doi.org/10.1117/12.657667

ACCESS THE FULL ARTICLE