Microfabrication and test of pre-aligned fiber bundle couplers with integrated microlens array

Ren Yang; Steven A. Soper; Wanjun Wang

doi:10.1117/12.650177

23 January 2006 Microfabrication and test of pre-aligned fiber bundle couplers with integrated microlens array

Ren Yang, Steven A. Soper, Wanjun Wang

Proceedings Volume 6113, MEMS/MOEMS Components and Their Applications III; 61130Y (2006) https://doi.org/10.1117/12.650177
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

This paper describes the design, microfabrication and testing of a pre-aligned array of fiber couplers with integrated out-of-plane microlenses using direct UV lithography of SU-8. The fiber bundle coupler includes a refractive microlens array and two fiberport collimator arrays. With the optical axis of the pixels parallel to the substrate, each pixel of the microlens array can be pre-aligned with the corresponding pixels of the fiberport collimator array as defined by the lithography mask design. This out-of-plane polymer microlens array was pre-aligned with the fiber collimator arrays with no additional adjustment and assembly required. This novel approach helps to dramatically reduce the running cost and improve the alignment quality and coupling efficiency.

Citation Download Citation

Ren Yang, Steven A. Soper, and Wanjun Wang "Microfabrication and test of pre-aligned fiber bundle couplers with integrated microlens array", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130Y (23 January 2006); https://doi.org/10.1117/12.650177

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