New applications for MOEMS

Eric Mounier; Yann de Charentenay; Jean-Christophe Eloy

doi:10.1117/12.634755

23 January 2006 New applications for MOEMS

Eric Mounier, Yann de Charentenay, Jean-Christophe Eloy

Proceedings Volume 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV; 611405 (2006) https://doi.org/10.1117/12.634755
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

In 2001, the sudden downturn of Telecom business changed the optical MEMS landscape. Some MEMS companies who were focusing only on telecom applications shut down (OMM as the most famous example) and many companies stopped their optical MEMS developments (Atmel, Memscap). However, some companies succeed to explore new applications outside the telecom area with their telecom technological platform. Today, there is a renewal of the MOEMS business and there are very interesting market opportunities for DMD. This article describes the new market trends for MOEMS and DMD applications. Several new applications are now appearing aside TV and projections systems that will widespread the use of DMDs. Maskless lithography, wavefront correction (adaptive optics) adaptive front light signal for cars, digital printing are applications currently in development where matrix of micro-mirrors could be used. Maskless lithography is still in a R&D status. It will be a low volume market but high R&D investment application that could benefit to other applications. Market acceptance may be an issue: the two main players ASML and Canon have internal projects under evaluation but it still have to prove that it is an attractive technology. Moreover, other MOEMS markets such are barcode readers, spectrometers, micro bolometers are analyzed and quantified.

Citation Download Citation

Eric Mounier, Yann de Charentenay, and Jean-Christophe Eloy "New applications for MOEMS", Proc. SPIE 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV, 611405 (23 January 2006); https://doi.org/10.1117/12.634755

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