Extended damping model for out-of-plane comb driven micromirrors

Thomas Klose; Thilo Sandner; Harald Schenk; Hubert Lakner

doi:10.1117/12.645981

23 January 2006 Extended damping model for out-of-plane comb driven micromirrors

Thomas Klose, Thilo Sandner, Harald Schenk, Hubert Lakner

Proceedings Volume 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV; 61140J (2006) https://doi.org/10.1117/12.645981
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

Since damping is the limiting factor for the reachable maximum deflection, it is a very important issue in the context of resonant microsystems. In this paper, we present an optimized comb design and an extended damping model for out-of-plane scanning micromirrors. It bases on the compact analytical model published by Sandner et al. (at the SPIE conference Photonics Europe in 2004). The basic concept of this model is to attribute viscous damping in the comb gaps as the dominant contributor of damping moments. The model is extended by findings from a fluidmechanical FEM model of an electrode finger. It also considers the effects from pressure and temperature changes. The extended model is verified and discussed in the context of experimental results. The primary goal of damping analysis and optimization is to minimize power consumption and to reduce driving voltage. To consider that, the damping of the out-of-plane electrode comb is discussed in the context of its capacitance. One of the results presented in this paper is a out-of-plane comb-drive with optimized drive efficiency.

Citation Download Citation

Thomas Klose, Thilo Sandner, Harald Schenk, and Hubert Lakner "Extended damping model for out-of-plane comb driven micromirrors", Proc. SPIE 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV, 61140J (23 January 2006); https://doi.org/10.1117/12.645981

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