High reflectivity and thermal-stability Cr-base reflectors and <i>n</i>-type ohmic contact for GaN-based flip-chip light-emitting diodes

Kuang-Po Hsueh; Kuo-Chun Chiang; Charles J. Wang; Yue-Ming Hsin

doi:10.1117/12.646154

3 March 2006 High reflectivity and thermal-stability Cr-base reflectors and n-type ohmic contact for GaN-based flip-chip light-emitting diodes

Kuang-Po Hsueh, Kuo-Chun Chiang, Charles J. Wang, Yue-Ming Hsin

Author Affiliations +

Proceedings Volume 6121, Gallium Nitride Materials and Devices; 61210V (2006) https://doi.org/10.1117/12.646154
Event: Integrated Optoelectronic Devices 2006, 2006, San Jose, California, United States

Abstract

We have investigated the thermal stability of three composite metals on their contact resistivities and luminous intensities for using as the reflector in flip-chip light-emitting diode (FCLED). The composite metals were simultaneously deposited on n-type GaN without alloy to form n-type Ohmic contact and simplify the process. The investigated composite metals were Ti/Al/Ti/Au (30/500/30/300 nm), Cr/Al/Cr/Au (30/500/30/300 nm) and Cr/Ti/Au (500/30/300 nm), respectively. The specific contact resistivity of Ti/Al/Ti/Au, Cr/Al/Cr/Au and Cr/Ti/Au on the n-type GaN Ohmic contact were changed from 5.4×10^-4, 6.6×10^-4 and 7.7×10^-4 Ω-cm² to 5.3×10^-4, 4.5×10^-4 and 1.3×10^-4 Ω-cm² respectively after 500 hours thermal stress at 150°C in the air. After 96 hours of thermal stress, the luminous intensities at 20 mA of these three structures were decreased 6.2%, 11.1% and 1.4%, respectively. Therefore, in addition to maintain good n-type ohmic contact and simplify the process, the Cr/Ti/Au composite metal demonstrates good thermal stability as a reflector in FCLED.

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Kuang-Po Hsueh, Kuo-Chun Chiang, Charles J. Wang, and Yue-Ming Hsin "High reflectivity and thermal-stability Cr-base reflectors and n-type ohmic contact for GaN-based flip-chip light-emitting diodes", Proc. SPIE 6121, Gallium Nitride Materials and Devices, 61210V (3 March 2006); https://doi.org/10.1117/12.646154

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