Synthesis and characterization of (Zn,Mg)O:P/ZnO heterostructures

Yuanjie Li; J. M. Erie; H. S. Kim; S. J. Pearton; D. P. Norton; J. J. Chen; F. Ren

doi:10.1117/12.645105

2 March 2006 Synthesis and characterization of (Zn,Mg)O:P/ZnO heterostructures

Yuanjie Li, J. M. Erie, H. S. Kim, S. J. Pearton, D. P. Norton, J. J. Chen, F. Ren

Proceedings Volume 6122, Zinc Oxide Materials and Devices; 61220R (2006) https://doi.org/10.1117/12.645105
Event: Integrated Optoelectronic Devices 2006, 2006, San Jose, California, United States

Abstract

Zn_0.9Mg_0.1O/ZnO heterostructures were grown on both sapphire and bulk ZnO substrates via pulsed laser deposition (PLD). Electron-beam deposited 100nm Au and Ti/Au (20nm/80nm) were used as the p-Ohmic contact and n-Ohmic contact, respectively. Post-annealing at above 450°C of the contacts showed improved ohmic characteristics. I-V dependences showed good rectifying diode-like behaviors with threshold voltage of 1.36V and 2.16V for the devices fabricated on sapphire and ZnO substrates, respectively. 0.01at%Al-doped n-ZnO (n ~10¹⁹ cm^-3) was deposited on MgO buffer layer via PLD. The electrical and optical properties strongly depend on the growth temperature, working pressure and laser energy. Room temperature photoluminescence showed band edge emission at ~377nm with very low deep level emission. The intensity of the band edge emission increased with growth temperature and deposition laser energy. Atomic force microscopy (AFM) results also showed that the root-mean-square (RMS) roughness increases with growth temperature and oxygen partial pressure. The full-width-at-half maximum (FWHM) for the ZnO (0002) peak is of 0.26-0.64°.

Citation Download Citation

Yuanjie Li, J. M. Erie, H. S. Kim, S. J. Pearton, D. P. Norton, J. J. Chen, and F. Ren "Synthesis and characterization of (Zn,Mg)O:P/ZnO heterostructures", Proc. SPIE 6122, Zinc Oxide Materials and Devices, 61220R (2 March 2006); https://doi.org/10.1117/12.645105

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available