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24 February 2006 Integrated high-Q reflective cavities
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We report on the demonstration of several integrated slab-waveguide-based concentric Fabry- Perot resonators employing holographic Bragg reflectors as curved 2D cavity mirrors. The cavities, fabricated in a low-loss silica-on-silicon slab waveguide using high-fidelity deep ultra violet photolithographic fabrication, exhibit Q-factors approaching up to 106 which are competitive with silicabased ring resonators. The Q-values achieved indicate very high slab waveguide homogeneity providing wavefront stability and extremely low loss from the volume-holographic lithographically scribed mirrors. Compared to silica-based ring resonators, the folded Fabry-Perot resonator design allows access to a substantially larger free spectral range by cavity shortening. Pathways to the implementation of highreflectivity and low loss distributed reflectors promise new directions in photonic integration with applications in sensing, filtering, and signal transport.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. W. Mossberg, C. Greiner, and D. Iazikov "Integrated high-Q reflective cavities", Proc. SPIE 6123, Integrated Optics: Devices, Materials, and Technologies X, 612315 (24 February 2006);

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