Optically driven microtools fabricated by UV lithography and RIE

Peter John Rodrigo; Lauge Gammelgaard; Peter Bøggild; Ivan R. Perch-Nielsen; Jesper Glückstad

doi:10.1117/12.646469

9 February 2006 Optically driven microtools fabricated by UV lithography and RIE

Peter John Rodrigo, Lauge Gammelgaard, Peter Bøggild, Ivan R. Perch-Nielsen, Jesper Glückstad

Proceedings Volume 6131, Nanomanipulation with Light II; 61310C (2006) https://doi.org/10.1117/12.646469
Event: Integrated Optoelectronic Devices 2006, 2006, San Jose, California, United States

Abstract

We demonstrate the use of multiple optical traps for driving various microfabricated silica structures in liquid host medium. Multiple counterpropagating-beam traps are formed using a generalized phase contrast (GPC) -based optical trapping system. A combination of UV-lithography and reactive-ion etching (RIE) is employed to fabricate the microtools whose design includes having multiple appendages with rounded endings by which optical traps hold and actuate them. Experiments show the collective and user-coordinated utility of multiple beams for driving microstructured objects whose future integration may lead to optically controlled micromachineries.

Citation Download Citation

Peter John Rodrigo, Lauge Gammelgaard, Peter Bøggild, Ivan R. Perch-Nielsen, and Jesper Glückstad "Optically driven microtools fabricated by UV lithography and RIE", Proc. SPIE 6131, Nanomanipulation with Light II, 61310C (9 February 2006); https://doi.org/10.1117/12.646469

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available