Analysis and fabrication of a new two dimensional near infrared pincushion silicon based PSD

Xunjun Qi; Bin Lin; Lu Lu; Wei Jin; Xiangqun Cao

doi:10.1117/12.674205

9 June 2006 Analysis and fabrication of a new two dimensional near infrared pincushion silicon based PSD

Xunjun Qi, Bin Lin, Lu Lu, Wei Jin, Xiangqun Cao

Proceedings Volume 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 61490I (2006) https://doi.org/10.1117/12.674205
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

A new photoelectric model of silicon based position sensitive detector (PSD) is built and the formulas of the photocurrent and spectral response are got with it. The effect of every layer thickness and SiO₂ thickness to the spectral response is analysis and calculation. The spectral response of PSD is affected by the thickness of p layer mainly at short wavelength and by the thickness of the depletion layer mainly at long wavelength. With the results, a new silicon based near infrared two dimensional pincushion PSD is designed and fabricated. Some necessary tests show that the peak spectral sensitivity of our device is 0.626A/W at 920nm wavelength.

Citation Download Citation

Xunjun Qi, Bin Lin, Lu Lu, Wei Jin, and Xiangqun Cao "Analysis and fabrication of a new two dimensional near infrared pincushion silicon based PSD", Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 61490I (9 June 2006); https://doi.org/10.1117/12.674205

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available