Precise processing of transparent material with femtosecond laser pulses

Lin Ma; Shunxiang Shi; Guanghua Cheng; Wei Zhao; Guofu Chen

doi:10.1117/12.674323

9 June 2006 Precise processing of transparent material with femtosecond laser pulses

Lin Ma, Shunxiang Shi, Guanghua Cheng, Wei Zhao, Guofu Chen

Proceedings Volume 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 614935 (2006) https://doi.org/10.1117/12.674323
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

Based on the physical mechanisms of femtosecond laser-transparent materials interactions, three kinds of micromachining including three dimensional data storage, optical waveguide network and grating with an amplified Ti:sapphire laser system are presented. These optical devices on different transparent materials by femtosecond pulses are featured. The effect of laser machined parameters such as irradiated energy, the scanning speed and the recording material upon fabricated optical devices is studied in detail. From examples, the versatility of femtosecond laser precise micromachining technique is demonstrated. Practical application of femtosecond laser materials processing is illuminated.

Citation Download Citation

Lin Ma, Shunxiang Shi, Guanghua Cheng, Wei Zhao, and Guofu Chen "Precise processing of transparent material with femtosecond laser pulses", Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 614935 (9 June 2006); https://doi.org/10.1117/12.674323

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