Parameters selections in confocal technology

Zhao Wang; Jinian Li; Shengcheng Zhu; Kejian Jiang

doi:10.1117/12.676754

19 May 2006 Parameters selections in confocal technology

Zhao Wang, Jinian Li, Shengcheng Zhu, Kejian Jiang

Author Affiliations +

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 615018 (2006) https://doi.org/10.1117/12.676754
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

3-D information becomes more and more important in engineering field. With the advent of miniaturization and the emergence of micromechanics, microdynamics and nanotechnology, 3-D measurement was introduced in confocal technology in recently years because of its high precision, non-contact, and wide field. This paper describes the principle, the characteristics of confocal microscopy. Main conclusions based on Fourier coherent theory are given. According to the conclusions, some key parameters can be selected. In addition, some actual case should be concerned. The paper also gives the practical set-up in the experiment which is designed for surface topography. Experiment results obtained for different conditions are also presented.

Citation Download Citation

Zhao Wang, Jinian Li, Shengcheng Zhu, and Kejian Jiang "Parameters selections in confocal technology", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 615018 (19 May 2006); https://doi.org/10.1117/12.676754

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