Paper
19 May 2006 Moire measuring technology for three-dimensional profile of the object
Yanjun Fu, Kuntao Yang
Author Affiliations +
Abstract
An optical system is designed to get projection of the transmission grating, the deformed grating is obtained on surface of the object. The image of the deformed grating is given by the lens, the reference grating is put on the place of the image, and then the moire fringe is obtained. The amplify principle of the moire fringe is used to measure the profile of the object. The optical principle of the projection is analyzed. And the relation between the phase and the height of object is deduced. From the different point of geometry optics and the physics opticsl, the optical system is analyzed, the factors that influence the image equality and the measuring result are obtained. So the betterment of improving the measuring precision is brought forward, and in the later information processing, because of the diffuse reflection, the image equality is not very well. In order to get a good image, the digital filter is used to filter the noise and smooth the image firstly. Then in order to improve the measure precision, the subdivision technology is applied. The Fourier transform profilometry and phase shifting technology is used in the calculation. A detail analyses is done both in time field and frequency field. And the method of improving the measuring precision is put forward. A good digital filter algorithm is brought forward in the Fourier transform profilometry. In the phase shifting technology, the detail formula of three-step and four-step is given. At last the phase that is relational with the high information of the object is get, but the phase is disconnected phase, after the unwrapping algorithm,the disconnected phase is changed to be the continuous phase. Taking use of the relation between the phase and height, the height is obtained. Then the three-dimensional profile of the measured object can be reconstructed. The system is very convenient for non-contact measure of profile of some objects.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yanjun Fu and Kuntao Yang "Moire measuring technology for three-dimensional profile of the object", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 615021 (19 May 2006); https://doi.org/10.1117/12.676420
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KEYWORDS
Phase shifting

Precision measurement

Image processing

Diffraction gratings

Fourier transforms

Image filtering

Moire patterns

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