Application of power spectral density to specify optical super-smooth surfaces

Yaohong Liu; Lin Teng; Daqi Li; Xiao Zhang

doi:10.1117/12.676477

23 February 2006 Application of power spectral density to specify optical super-smooth surfaces

Yaohong Liu, Lin Teng, Daqi Li, Xiao Zhang

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61503I (2006) https://doi.org/10.1117/12.676477
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

The power spectral density (PSD) is an appropriate way to specify the optical super-smooth surfaces. The reasons to characterize the super-smooth surfaces using the PSD are discussed. Some super-smooth mirror substrates obtained by different process methods are measured with an atomic force microscope (AFM). The measured optical surfaces are characterized by the PSD. The result shows that the PSD is of great guidance to the selection of manufacturing methods and process improvement.

Citation Download Citation

Yaohong Liu, Lin Teng, Daqi Li, and Xiao Zhang "Application of power spectral density to specify optical super-smooth surfaces", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61503I (23 February 2006); https://doi.org/10.1117/12.676477

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