Demonstration of phase-shift masks for extreme-ultraviolet lithography

Bruno La Fontaine; Adam R. Pawloski; Obert Wood; Yunfei Deng; Harry J. Levinson; Patrick Naulleau; Paul E. Denham; Eric Gullikson; Brian Hoef; Christian Holfeld; Christian Chovino; Florian Letzkus

doi:10.1117/12.652212

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22 March 2006 Demonstration of phase-shift masks for extreme-ultraviolet lithography

Bruno La Fontaine, Adam R. Pawloski, Obert Wood, Yunfei Deng, Harry J. Levinson, Patrick Naulleau, Paul E. Denham, Eric Gullikson, Brian Hoef, Christian Holfeld, Christian Chovino, Florian Letzkus

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Proceedings Volume 6151, Emerging Lithographic Technologies X; 61510A (2006) https://doi.org/10.1117/12.652212
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

We report on a method to produce any type of phase-shift masks for EUV lithography. We have successfully fabricated an unattenuated phase-shift mask consisting of phase patterns and confirmed the expected performance of such a mask through resist printing at λ=13.3 nm. Finally actinic metrology reveals that these etched-multilayer masks, left without a capping layer, tend to degrade over time.

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Bruno La Fontaine, Adam R. Pawloski, Obert Wood, Yunfei Deng, Harry J. Levinson, Patrick Naulleau, Paul E. Denham, Eric Gullikson, Brian Hoef, Christian Holfeld, Christian Chovino, and Florian Letzkus "Demonstration of phase-shift masks for extreme-ultraviolet lithography", Proc. SPIE 6151, Emerging Lithographic Technologies X, 61510A (22 March 2006); https://doi.org/10.1117/12.652212

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