Multilayer optics with spectral purity layers for the EUV wavelength range

E. Louis; R. W .E. van de Kruijs; A. E. Yakshin; S. Alonso van der Westen; F. Bijkerk; M. M. J. W. van Herpen; D. J. W. Klunder; L. Bakker; H. Enkisch; S. Müllender; M. Richter; V. Banine

doi:10.1117/12.675132

24 March 2006 Multilayer optics with spectral purity layers for the EUV wavelength range

E. Louis, R. W .E. van de Kruijs, A. E. Yakshin, S. Alonso van der Westen, F. Bijkerk, M. M. J. W. van Herpen, D. J. W. Klunder, L. Bakker, H. Enkisch, S. Müllender, M. Richter, V. Banine

Author Affiliations +

Proceedings Volume 6151, Emerging Lithographic Technologies X; 615139 (2006) https://doi.org/10.1117/12.675132
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

Reported are the first calculations and experimental results of the deposition of EUV multilayer coatings that actively suppress the reflectance in the VUV wavelength range. In the undesired 100-200 nm band a factor of five reduction was achieved for one single optical element, while only a minor loss of 4.5% reflectance for λ = 13.5 nm, the operating wavelength of EUVL, was found.

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E. Louis, R. W .E. van de Kruijs, A. E. Yakshin, S. Alonso van der Westen, F. Bijkerk, M. M. J. W. van Herpen, D. J. W. Klunder, L. Bakker, H. Enkisch, S. Müllender, M. Richter, and V. Banine "Multilayer optics with spectral purity layers for the EUV wavelength range", Proc. SPIE 6151, Emerging Lithographic Technologies X, 615139 (24 March 2006); https://doi.org/10.1117/12.675132

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