Advanced photoresist dispense valve control technology

Garrett Standley; Brian Kidd; Kevin Hartman

doi:10.1117/12.656628

29 March 2006 Advanced photoresist dispense valve control technology

Garrett Standley, Brian Kidd, Kevin Hartman

Proceedings Volume 6153, Advances in Resist Technology and Processing XXIII; 61534O (2006) https://doi.org/10.1117/12.656628
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

Resist minimization techniques have been around since the mid-1990s. As the volume decreases, the accuracy of the systems must increase. These inaccuracies can negate any savings that could potentially be acquired due to rework or even scrap. This has become a problem for older factories with pumps that are not accurate below 2.0ml. In order to help with these issues, Integrated Designs has created the digital dispense valve. This mechanical addition can prolong the life of a pump and saving the costly pump replacement scenario. The digital dispense valve increases the accuracy at lower dispense volumes and give more repeatable suckback control than was previously available for this generation of pump systems.

Citation Download Citation

Garrett Standley, Brian Kidd, and Kevin Hartman "Advanced photoresist dispense valve control technology", Proc. SPIE 6153, Advances in Resist Technology and Processing XXIII, 61534O (29 March 2006); https://doi.org/10.1117/12.656628

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