Second generation fluids for 193nm immersion lithography

Roger H. French; Weiming Qiu; Min K. Yang; Robert C. Wheland; Michael F. Lemon; Aaron L. Shoe; Doug J. Adelman; Michael K. Crawford; Hoang V. Tran; Jerald Feldman; Steve J. McLain; Sheng Peng

doi:10.1117/12.656626

15 March 2006 Second generation fluids for 193nm immersion lithography

Roger H. French, Weiming Qiu, Min K. Yang, Robert C. Wheland, Michael F. Lemon, Aaron L. Shoe, Doug J. Adelman, Michael K. Crawford, Hoang V. Tran, Jerald Feldman, Steve J. McLain, Sheng Peng

Author Affiliations +

Proceedings Volume 6154, Optical Microlithography XIX; 615415 (2006) https://doi.org/10.1117/12.656626
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

Our studies of second generation immersion fluid candidates are moving beyond the discovery phase, and into addressing issues for their commercial application. Thus, we continue work to examine and fundamentally understand fluid transparency and refractive index, to fully optimize these properties. At the same time, we are now examining other process concerns, including index variation with temperature, new imaging performance studies, fluid handling considerations, and fluid property maintenance with active recycle during lithographic exposure. The systems and procedures we have developed in these areas continue to show our fluids' promise for sub-45nm immersion lithography applications.

Citation Download Citation

Roger H. French, Weiming Qiu, Min K. Yang, Robert C. Wheland, Michael F. Lemon, Aaron L. Shoe, Doug J. Adelman, Michael K. Crawford, Hoang V. Tran, Jerald Feldman, Steve J. McLain, and Sheng Peng "Second generation fluids for 193nm immersion lithography", Proc. SPIE 6154, Optical Microlithography XIX, 615415 (15 March 2006); https://doi.org/10.1117/12.656626

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available