A novel approach for full-chip SRAF printability check

Chi-Yuan Hung; Liguo Zhang; Qingwei Liu

doi:10.1117/12.654113

20 March 2006 A novel approach for full-chip SRAF printability check

Chi-Yuan Hung, Liguo Zhang, Qingwei Liu

Proceedings Volume 6154, Optical Microlithography XIX; 615438 (2006) https://doi.org/10.1117/12.654113
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

With the critical dimension of IC design decreases dramatically, to meet the yield target of the manufacture process, resolution enhancement technologies become extremely important nowadays. For 90nm technology node and below, sub rule assistant feature (SRAF) are usually employed to enhance the robustness of the micro lithography process. SRAF is really a powerful methodology to push the process limit for given equipment conditions. However, there is also a drawback of the SRAF. It is very hard to predict the printability of the SRAFs, especially when SRAF is applied on full chips. This work is trying to demonstrate a new approach to check the printability of the SRAF on full-chip level. First, we try to capture the lithography process information through real empirical wafer data. Then we try to determine the margin of the conditions for which SRAFs can be printed out on the wafer. Based on all the information, we can then apply full chip optical rule check (ORC) to check the printability of SRAF. By this approach, the printout risk of the SRAF can be reduced effectively with acceptable time consuming.

Citation Download Citation

Chi-Yuan Hung, Liguo Zhang, and Qingwei Liu "A novel approach for full-chip SRAF printability check", Proc. SPIE 6154, Optical Microlithography XIX, 615438 (20 March 2006); https://doi.org/10.1117/12.654113

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