Measurements of conductivity of thin metal films at microwave frequencies

Tomasz Zychowicz; Jerzy Krupka

doi:10.1117/12.675096

26 April 2006 Measurements of conductivity of thin metal films at microwave frequencies

Tomasz Zychowicz, Jerzy Krupka

Proceedings Volume 6159, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments IV; 61591X (2006) https://doi.org/10.1117/12.675096
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments IV, 2005, Wilga, Poland

Abstract

TE₀₁₁ mode cavity method is presented for the surface resistance and conductivity measurements of thin metal films deposited on dielectric substrates. Rigorous solutions of multilateral metal-dielectric resonator structure are given that allow to determine surface resistance and conductivity from measured Q-factors and resonant frequencies of the structure. Measurements of several thin films have been performed at frequencies 9 GHz and 17 GHz

Citation Download Citation

Tomasz Zychowicz and Jerzy Krupka "Measurements of conductivity of thin metal films at microwave frequencies", Proc. SPIE 6159, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments IV, 61591X (26 April 2006); https://doi.org/10.1117/12.675096

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