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15 March 2006 Scanning acoustic defocused transmission microscopy with vector contrast combined with holography for weak bond imaging
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Abstract
Surface focused acoustic transmission microscopy is employed for projection (tomographic) imaging of bonded materials including wafers. Short pulse excitation with apodized focusing transducers operated in transmission and two channel quadrature transient detection are employed for multiple contrast imaging. The achievable contrast schemes are based on mode selection for longitudinal, transverse, mode converted, and scattered modes. The identification of the involved modes including conversion schemes is experimentally accessible by time-gating of the recorded signal and by observation of spatially selected holograms. Perfect bonding, disbonding, and weak bonding can be studied and characterized by the developed mode selective imaging scheme. The characteristic features of weak bonding phenomena are demonstrated and characterized.
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Evgeny Twerdowski, Moritz von Buttlar, and Wolfgang Grill "Scanning acoustic defocused transmission microscopy with vector contrast combined with holography for weak bond imaging", Proc. SPIE 6177, Health Monitoring and Smart Nondestructive Evaluation of Structural and Biological Systems V, 617718 (15 March 2006); https://doi.org/10.1117/12.657881
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