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21 April 2006 Replication of optical rib waveguide structures using nickel shims
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Abstract
The use of conventional fabrication techniques for the fabrication of polymer based photonic integrated waveguide circuits is a necessary step to reduce costs. The replication of rib waveguides is presented using nickel shims. Results of replicated waveguides and 1 x 2 multimode interference (MMI) couplers are shown.
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Mathias Bründel, Patric Henzi, and Dominik Gerhard Rabus "Replication of optical rib waveguide structures using nickel shims", Proc. SPIE 6185, Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration, 618508 (21 April 2006); https://doi.org/10.1117/12.661865
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