Temperature dependence of laser backwriting process on glass

Antonio Castelo; Daniel Nieto; María Teresa Flores-Arias; Carmen Bao; María Victoria Pérez; Carlos Gómez-Reino; Clara Isabel López-Gascon; Xermán de la Fuente; Raul Rangel-Rojo

doi:10.1117/12.663377

21 April 2006 Temperature dependence of laser backwriting process on glass

Antonio Castelo, Daniel Nieto, María Teresa Flores-Arias, Carmen Bao, María Victoria Pérez, Carlos Gómez-Reino, Clara Isabel López-Gascon, Xermán de la Fuente, Raul Rangel-Rojo

Author Affiliations +

Proceedings Volume 6185, Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration; 61851B (2006) https://doi.org/10.1117/12.663377
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

We present the laser backwriting process on glass by laser ablation of metal targets, in order to fabricate waveguides on pyrex glasses. An horizontal position of the sample and the plate was found suitable to improve the effect of the plume in the sample with respect to the alternative vertical arrangement. We have analysed the longitudinal and transversal profiles, using a profilometer and have compared the results for the different laser sources used, speeds and metal targets. We have analyzed the refractive index profile of the samples obtained, in order to evaluate the change in the substrate due to the metal ablation. A cleaning of the surface and a heat treatment of the glass has been made in order to improve the results.

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Antonio Castelo, Daniel Nieto, María Teresa Flores-Arias, Carmen Bao, María Victoria Pérez, Carlos Gómez-Reino, Clara Isabel López-Gascon, Xermán de la Fuente, and Raul Rangel-Rojo "Temperature dependence of laser backwriting process on glass", Proc. SPIE 6185, Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration, 61851B (21 April 2006); https://doi.org/10.1117/12.663377

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