New generation of fully integrated optical microscopes on-chip: application to confocal microscope

Sylwester Bargiel; Lukasz Nieradko; Michal Józwik; Christophe Gorecki; Jan A. Dziuban

doi:10.1117/12.663770

21 April 2006 New generation of fully integrated optical microscopes on-chip: application to confocal microscope

Sylwester Bargiel, Lukasz Nieradko, Michal Józwik, Christophe Gorecki, Jan A. Dziuban

Proceedings Volume 6186, MEMS, MOEMS, and Micromachining II; 618602 (2006) https://doi.org/10.1117/12.663770
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

In the paper the new concept of fully integrated scanning confocal optical microscope on-chip is proposed. The operation of this microscope combines the 3-D transmissive scanning of VCSEL laser beam by use of two MOEMS scanners, and active signal detection, based on the optical feedback in the VCSEL laser cavity. The silicon-based electrostatically driven scanners provide controlled movement of two convex microlenses, working as an objective lens of microscope. Glass microlenses are monolithically integrated on movable silicon tables of scanners. The first results of technological investigation on the microscope components are presented.

Citation Download Citation

Sylwester Bargiel, Lukasz Nieradko, Michal Józwik, Christophe Gorecki, and Jan A. Dziuban "New generation of fully integrated optical microscopes on-chip: application to confocal microscope", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 618602 (21 April 2006); https://doi.org/10.1117/12.663770

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