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21 April 2006 A 2D MEMS stage for optical applications
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Abstract
A 2D MEMS platform for a microlens scanner application is reported. The platform is fabricated on an SOI wafer with 50 μm thick device layer. Entire device is defined with a single etching step on the same layer. Through four S-shaped beams, the device is capable of producing nonlinear 2D motion from linear 1D translation of two pairs of comb actuator sets. The device has a clear aperture of 2mm by 2mm, which is hallowed from the backside for micro-optics assembly. In this paper, a numerical device model and its validation via experimental characterization results are presented. Integration of the micro-optical components with the stage is also discussed. Additionally, a new driving scheme to minimize the settling time of the device in DC operation is explored.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Caglar Ataman, Yves Petremand, Wilfried Noell, Hakan Ürey, Marc Epitaux, and Nico F. de Rooij "A 2D MEMS stage for optical applications", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 618603 (21 April 2006); https://doi.org/10.1117/12.664777
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