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21 April 2006 Parallel atomic force microscopy using optical heterodyne detection
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We report on an array of atomic force microscopes (AFM) based on a simple optical set-up using heterodyne detection. The deflection of AFM cantilevers is given by the path differences between the reference and the measuring wave in a Michelson interferometer. A matrix of micro-lenses is placed just above the cantilevers, in such a way that the deflected light from each cantilever is collected by one micro-lens. Both the micro-lenses and the cantilever chips are previously glued to increase the robustness of the system. The interference between the light from each micro-lenses and the reference light is selected by a diaphragm and subsequently detected by a photodetector. This procedure is repeated for each cantilever. In order to validate our instrument we measure the profile of a binary grating having a step height of 19.66 nm. By a piezoelectric platform a lateral range of 10 μm was scanned with a speed of 1 μm/s and an integration time of 10 ms, which leads to a lateral resolution of 10 nm. The profiles measured by the cantilevers are in good agreement with the profile of the sample grating.
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Laura Chantada, Myun-Sik Kim, Omar Manzardo, René Dändliker, Laure Aeschimann, Urs Staufer, Peter Vettiger, Kenneth Weible, and Hans Peter Herzig "Parallel atomic force microscopy using optical heterodyne detection", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860B (21 April 2006);

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