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21 April 2006 A MEMS based visible-NIR Fourier transform microspectrometer
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Design, fabrication and characterization of a novel out-of-plane vertical comb-drive actuator based Fourier transform microspectrometer (FTS) is presented. The spectrometer utilizes resonant mode vertical comb actuators as a variable-depth diffraction grating and a single photodetector to monitor the 0th order of the diffraction pattern. The spectrum of the source illuminating the gratings is computed by Fourier transforming the 0th order intensity as a function of the optical path difference. The vertical comb actuators have a travel range of 100 μm under atmospheric pressure with 28V excitation, which yields a theoretical spectral resolution of 0.5nm in the visible and better than 5nm in the telecom wavelengths.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. Ataman, H. Urey, S. O. Isikman, and A. Wolter "A MEMS based visible-NIR Fourier transform microspectrometer", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860C (21 April 2006);

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