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21 April 2006 Tunable InP/air MOEMS filter with record breaking selectivity
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We describe the design and fabrication of novel Fabry-Perot tunable filters based on a deformable structure composed of surface micromachined indium phosphide (InP) / Air Distributed Bragg Reflectors (DBRs). As compared to conventional designs, superior spectral selectivity has been achieved by displacing the resonant cavity into the high index material (InP) rather than in air. This configuration is expected to reduce significantly the lateral losses of the cavity. The filters feature also a novel doping structure for bi-directional electrostatic actuation. We present simulations and experimental results that demonstrate the effectiveness of this high index cavity concept for improving the selectivity of small dimension tunable MOEMS filters. The devices are fabricated using a multiple InP-air-gap MOEMS technology based on the sacrificial etching of an InP / InGaAs stack A spectral linewidth better than 0.15 nm over a tuning range of 40 nm is experimentally demonstrated. Design improvements for doubling the tuning range are also proposed.
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Michel Garrigues, Jérôme Danglot, and Jean-Louis Leclercq "Tunable InP/air MOEMS filter with record breaking selectivity", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860I (21 April 2006);

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