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21 April 2006 Management and verification for MEMS fabrication processes
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Abstract
In MEMS design many different fabrication techniques and materials are involved and the strong dependency between microstructure and fabrication process leads to application specific fabrication processes. A comprehensive management of process knowledge is required to take into account the various interdependencies and constraints occurring within a MEMS fabrication process. This paper presents an environment for the management of process knowledge and provides support for the design and verification of application specific fabrication processes.
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T. Schmidt, D. Ortloff, K. Hahn, A. Wagener, J. Popp, and R. Brück "Management and verification for MEMS fabrication processes", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860S (21 April 2006); https://doi.org/10.1117/12.661919
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