Measurements of corner cubes microstructures by high-magnification digital holographic microscopy

Jonas Kühn; Etienne Cuche; Yves Emery; Tristan Colomb; Florian Charrière; Frédéric Montfort; Mikhail Botkine; Nicolas Aspert; Christian Depeursinge

doi:10.1117/12.662030

28 April 2006 Measurements of corner cubes microstructures by high-magnification digital holographic microscopy

Jonas Kühn, Etienne Cuche, Yves Emery, Tristan Colomb, Florian Charrière, Frédéric Montfort, Mikhail Botkine, Nicolas Aspert, Christian Depeursinge

Author Affiliations +

Proceedings Volume 6188, Optical Micro- and Nanometrology in Microsystems Technology; 618804 (2006) https://doi.org/10.1117/12.662030
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

This paper presents Digital Holographic Microscopy (DHM) quantitative measurements of transparent high aspect-ratio microstructures. Our experiment was performed using a digital holographic microscope in transmission configuration with a 60x magnification 1.3 NA oil immersion microscope objective, with a diode laser source at 664 nm. We used a calculation model based on the use of two immersion liquids for the experiment, the first one to resolve the phase jumps by using a refractive index liquid close to the sample index, in combination with a second one to retrieve the sample topology from the optical path length information. Such a model makes absolute topographic measurements of high aspect ratio transparent samples achievable by DHM. The model is then applied to measure 25 and 50 m transparent micro-corner cubes arrays, which exhibit up to 1:1,4 aspect ratio with theoretical slopes up to about 55 degrees. Thanks to our phase measurement precision down to 1°, we found possible to measure accurately the slopes of each face of the microstructures under investigation, and this with a good theoretical agreement.

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Jonas Kühn, Etienne Cuche, Yves Emery, Tristan Colomb, Florian Charrière, Frédéric Montfort, Mikhail Botkine, Nicolas Aspert, and Christian Depeursinge "Measurements of corner cubes microstructures by high-magnification digital holographic microscopy", Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 618804 (28 April 2006); https://doi.org/10.1117/12.662030

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