An integrated approach for photonic crystal inspection and characterization

B. Tiribilli; P. Ferraro; S. Grilli; G. Molesini; M. Vannoni; M. Vassalli

doi:10.1117/12.664930

27 April 2006 An integrated approach for photonic crystal inspection and characterization

B. Tiribilli, P. Ferraro, S. Grilli, G. Molesini, M. Vannoni, M. Vassalli

Proceedings Volume 6188, Optical Micro- and Nanometrology in Microsystems Technology; 61880A (2006) https://doi.org/10.1117/12.664930
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

Photonic crystals are attractive optical materials for controlling and manipulating light. They are of great interest for both fundamental and applied research, and are expected to find commercial applications soon. In this work digital holography, white light interferometry and atomic force microscopy have been applied to the inspection and characterization of 1D and 2D nanofabricated LiN photonic crystals. Periodic pattern with periods ranging form several microns to a fraction of micron have been accurately analysed. Optical methods allow exploring relatively large areas while atomic force microscopy is well suited for high-resolution inspection of the small features.

Citation Download Citation

B. Tiribilli, P. Ferraro, S. Grilli, G. Molesini, M. Vannoni, and M. Vassalli "An integrated approach for photonic crystal inspection and characterization", Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 61880A (27 April 2006); https://doi.org/10.1117/12.664930

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available