Experimental proof-of-principle 3D measurements of micro-objects by digital holographic tomography

Agata Jozwicka; Malgorzata Kujawinska

doi:10.1117/12.663394

28 April 2006 Experimental proof-of-principle 3D measurements of micro-objects by digital holographic tomography

Agata Jozwicka, Malgorzata Kujawinska

Proceedings Volume 6188, Optical Micro- and Nanometrology in Microsystems Technology; 61880K (2006) https://doi.org/10.1117/12.663394
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

In the paper the experimental and numerical reconstruction of phase (waveguide and multimode fiber) and amplitude (microscopic glass plates with stickers glued on it) microobjects using digital holography setup is presented. The measurement setup simulates the simplified arrangements for digital holographic tomography with two passes through the object. The experiment has proved the possibility of independent reconstruction of phase and amplitude for two different reconstruction distances for a certain class of objects. This allows to plan further activity aimed in development of digital holographic tomography system for 3D reconstruction of amplitude-phase objects.

Citation Download Citation

Agata Jozwicka and Malgorzata Kujawinska "Experimental proof-of-principle 3D measurements of micro-objects by digital holographic tomography", Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 61880K (28 April 2006); https://doi.org/10.1117/12.663394

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